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ATLANT 3D

ALD & Advanced
Materials

ALD & Advanced Materials

Transform Material Development With Atomic Layer Precision

Research and development in advanced materials requires systems that balance precision
with practicality.

Traditional ALD systems often present steep learning curves, integration challenges, and scalability limitations that slow breakthrough discoveries and commercial implementation.

Beyond the Boundaries
of Traditional Processing

Shape Matter
at the Atomic Level

  • Develop novel precursors for combinatorial material science
  • Optimize process parameters for atomic-level control
  • Explore next-generation material stacks
  • Support emerging research demands

From Complex
to Seamless

  • Prototype multi-layered structures quickly
  • Validate uniformity on various substrates
  • Create specialized thin-film devices
  • Integrate seamlessly with existing systems

Laboratory Success
to Market Reality

  • Maintain precision from lab to fab
  • Support multiple sequential materials
  • Enable selective and localized area deposition
  • Achieve consistent results at scale

The Power at Your Command

  • Temperature range: Room temperature to 300°C
  • Material compatibility with ALD materials
  • Conformal deposition on 90° walls: Up to 200 µm
  • Stage process speed: 50 to 200 mm/sec
  • Environment: Open atmospheric or controlled ambient (inert chamber in development)

Your Advanced Materials Arsenal

  • Wide Material Processing:

oxides, noble metals, semiconductors, superconductors

  • Functional Coatings

optical, catalytic, conductive, transparent, semiconductor materials

  • Versatile Substrates

silicon wafers, sapphire, glass, polymers for sample sizes up to 4 inches (8 and 12 inch in development)

Versatility Meets Precision

Precise Control

multi-material stacking, temperature
variation, lateral resolution adjustment and digital thickness monitoring

Modular System Design

interchangeable nozzles for process model switching (ALD, ALE, CVD, MLD)

High Data Yield

many data sets for various materials and temperatures, and geometries on a single
substrate

Start Your Next Materials Breakthrough

Connect with our materials science team to explore how atomic-layer processing can advance your research and development goals.

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Nik Thorsen

Nik Thorsen

Business Development Manager