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ATLANT 3D

NANOFABRICATOR® PRO

Status

In development

Release date

July 2025

Sales

Ready for pre-order

Pushing the Boundaries
of Micro & Nano Fabrication

  • Deposition speed up to 500 mm/s
  • Up to 6 Materials simultaneously
  • 400 to 50 µm Line Width
  • Sample size up to 200 mm
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Versatility Meets Precision

Sequential deposition
of up to 6 materials

6 different precursors and 6 different reactants can be loaded at the same time, allowing you to quickly switch between the materials you wish to deposit or test.

Samples size
up to 200mm

The stage of NANOFABRICATOR® PRO can accommodate wafers up to 8” and other shapes under 200×200 mm.

Rapid
deposition

The NANOFABRICATOR® PRO stage can move up to 500mm/s, with a deposition speed dependent on the sample and process specifications.

Advanced Microfabrication

Rapid, Flexible, Versatile
& Atimically Precise Processing

At the heart of the NANOFABRICATOR® PRO is the Direct Atomic Layer Processing (DALP®) technology, a breakthrough in nanoscale engineering. This technology allows for atomic-scale precision, enabling the creation of materials and devices with unprecedented accuracy and complexity.

It is designed for rapid prototyping and the development of new device structures, offering a wide selection of materials
for Atomic Layer Deposition (ALD) processes. Additionally, its lithography-less single-wafer optimization significantly streamlines the fabrication process, making it an ideal tool for innovative and efficient prototype development in various scientific
and industrial fields.

DALP® has revolutionized prototyping, turning a traditionally lengthy process into a rapid, precise operation. Key benefits include accelerated development cycles, atomic-level control for complex prototypes, versatile material and surface adaptability, and cost reductions due to increased efficiency. This advancement in DALP® fosters a conducive environment for innovative microdevice fabrication, marking a significant leap in microfabrication technology.

Transform your research today

Interested in learning more? View detailed specifications and features of the Nanofabricator™ Lite. Let’s discuss how Nanofabricator™ Lite can support your unique research goals

Download NFL Specifications
contact BD Manager
Nik Thorsen

Nik Thorsen

Business Development Manager