Innobooster: Multi-head DALP system for enhanced throughput 

Scope

ATLANT 3Dpioneered Direct Atomic Layer Processing (DALP) for micro-/nanofabrication, addressing current limitations of the field with cost efficiency, material diversity, and atomic-level resolution. Building on this success, ATLANT 3D seeks to develop a multi-head DALP system to meet the industry’s need for greater throughput, enhancing efficiency and flexibility, reducing production costs, and meeting the rising demand for micro/nano-products in a dynamic market.